NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy

ジャーナル論文

著者

Asahiko Matsuda (author) (この著者で検索)

https://orcid.org/0000-0001-5989-027X

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Asahiko Matsuda ;

Takashi Teramoto (author) (この著者で検索)

https://orcid.org/0000-0002-9368-1284 (unauthenticated)

Takashi Teramoto ;

Takahiro Nagata (author) (この著者で検索)

https://orcid.org/0000-0002-8591-2943

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takahiro Nagata ;

Dominic Gerlach (author) (この著者で検索)

https://orcid.org/0000-0003-1859-0750 (unauthenticated)

Dominic Gerlach ;

Peng Shen (author) (この著者で検索)

https://orcid.org/0000-0002-1971-5490 (unauthenticated)

Peng Shen ;

Shigenori Ueda (author) (この著者で検索)

https://orcid.org/0000-0001-9425-0614

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Shigenori Ueda ;

Takako Kimura (author) (この著者で検索)

Takako Kimura ;

Christian Dussarrat (author) (この著者で検索)

Christian Dussarrat ;

Toyohiro Chikyow (author) (この著者で検索)

https://orcid.org/0000-0003-3860-4806

NIMS Researchers Directory SAMURAI

Toyohiro Chikyow

キーワード

Fluorination, Surface passivation, hard X-ray photoelectron spectroscopy, Gallium nitride

刊行年月日

2024-03-19

更新時刻

2026-03-19 14:27:24 +0900