Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

データセット

著者

OGIWARA, Toshiya (author) (この著者で検索)

https://orcid.org/0000-0002-7376-6571

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

OGIWARA, Toshiya ;

NAGATA, Takahiro (author) (この著者で検索)

https://orcid.org/0000-0002-8591-2943

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

NAGATA, Takahiro ;

YOSHIKAWA, Hideki (author) (この著者で検索)

https://orcid.org/0000-0002-7389-8865

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

YOSHIKAWA, Hideki

キーワード

Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam

刊行年月日

2019-03-07

更新時刻

2024-03-30 18:50:38 +0900