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HfO2-Fig9-Work-20230518.pdf
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-10-08 12:20:27 +0900
HfO2-Fig5-Work-20230419.pdf
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:38 +0900
HfO2-Fig6-Work-20230118.pdf
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-03-30 18:50:25 +0900
HfO2-Fig7-Work-20221213.pdf
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:12:25 +0900
HfO2-Fig8-Work-20220304-2.pdf
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
データセット
著者
OGIWARA, Toshiya (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
NAGATA, Takahiro (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI ;
YOSHIKAWA, Hideki (author) (この著者で検索)
National Institute for Materials Science
ORCID SAMURAI
キーワード
Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:29 +0900
Vol.25_No.3_2019.pdf
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
ジャーナル論文
著者
ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
刊行年月日
2020-06-04
更新時刻
2022-10-03 01:48:14 +0900
Vol.24_No.3_03_Ogiwara.pdf
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
ジャーナル論文
著者
ORCID SAMURAI ; ORCID SAMURAI ; ORCID SAMURAI
キーワード
Auger Depth Profiling analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
刊行年月日
2019-03-07
更新時刻
2024-01-05 22:11:28 +0900
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