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Hasegawa_JCSJ-2.pdf
<i>In-plane</i> lattice orientation in aluminum scandium nitride epitaxial films deposited on Nb-doped SrTiO<sub>3</sub>(111) substrates via reactive magnetron sputtering
Article
Creator
Kota Hasegawa ; Takao Shimizu SAMURAI ORCID ; Naoki Ohashi SAMURAI ORCID
Keyword
(Al,Sc)N, Epitaxial films, magnetron sputtering, strontium titanate, lattice mismatch, lattice orientation, Scandium Aluminate
Date published
2023-07-01
Updated at
2025-04-14 16:30:51 +0900