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[Vol. 68]New GaN MEMS Resonator Is Temperature-Stable up to 600 K_ WPI-MANA.pdf
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
Date published
2021-07-13
Updated at
2023-12-26 21:38:08 +0900
[Vol. 55]A New On-chip Sensor for Infrared Spectrography_ WPI-MANA.pdf
[Research Highlights Vol.55] A New On-chip Sensor for Infrared Spectrography
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
multi-wavelength sensing, infrared sensing, high wavelength resolution, high-directivity, thermal radiation, perfect absorbers, pyroelectric sensors, Au, Si, Si3N4, ZnO
Date published
2019-11-14
Updated at
2023-12-25 00:30:24 +0900
[Vol. 28]Opening the Way to Mobile Olfaction with Nanomechanical Sensors _ WPI-MANA.pdf
[Research Highlights Vol.28] Opening the Way to Mobile Olfaction with Nanomechanical Sensors
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Nanomechanical sensor, Artificial Olfaction, Industry-government-academia joint research framework, Si, Polymer, Nanoparticle
Date published
2016-12-02
Updated at
2023-12-25 00:30:19 +0900
[Vol. 14]Nanomechanical sensors detect cancer from breath_ WPI-MANA.pdf
[Research Highlights Vol.14] Nanomechanical sensors detect cancer from breath
Magazine
Collection
Research Highlights
Creator
International Center for Materials Nanoarchitectonics (WPI-MANA) (author) (Search by this author)
National Institute for Materials Science
Keyword
Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Breath Analysis, Breath Diagnosis, Cancer Diagnosis, Nanomechanical sensor, Artificial Olfaction, Polymer, Si
Date published
2014-04-23
Updated at
2023-12-25 00:30:16 +0900