4 records found.
[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K
- Magazine
- Collection
- Research Highlights
- Creator
- International Center for Materials Nanoarchitectonics (WPI-MANA)
- Keyword
- GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain
- Date published
- 2021-07-13
- Updated at
- 2023-12-26 21:38:08 +0900
[Research Highlights Vol.55] A New On-chip Sensor for Infrared Spectrography
- Magazine
- Collection
- Research Highlights
- Creator
- International Center for Materials Nanoarchitectonics (WPI-MANA)
- Keyword
- multi-wavelength sensing, infrared sensing, high wavelength resolution, high-directivity, thermal radiation, perfect absorbers, pyroelectric sensors, Au, Si, Si3N4, ZnO
- Date published
- 2019-11-14
- Updated at
- 2023-12-25 00:30:24 +0900
[Research Highlights Vol.28] Opening the Way to Mobile Olfaction with Nanomechanical Sensors
- Magazine
- Collection
- Research Highlights
- Creator
- International Center for Materials Nanoarchitectonics (WPI-MANA)
- Keyword
- Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Nanomechanical sensor, Artificial Olfaction, Industry-government-academia joint research framework, Si, Polymer, Nanoparticle
- Date published
- 2016-12-02
- Updated at
- 2023-12-25 00:30:19 +0900
[Research Highlights Vol.14] Nanomechanical sensors detect cancer from breath
- Magazine
- Collection
- Research Highlights
- Creator
- International Center for Materials Nanoarchitectonics (WPI-MANA)
- Keyword
- Olfactory sensor, Membrane-type Surface stress Sensor (MSS), Breath Analysis, Breath Diagnosis, Cancer Diagnosis, Nanomechanical sensor, Artificial Olfaction, Polymer, Si
- Date published
- 2014-04-23
- Updated at
- 2023-12-25 00:30:16 +0900