Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects

Article

Creator

Takayuki Harada ; Zuin Ping Lily Ang ; Yuki Sakakibara ; Takuro Nagai ; Yasushi Masahiro

Keyword

Interconnect, Thin films, Conductive material, Low dimensional materials, Electronic materials

Date published

2025-06-02

Updated at

2025-06-10 08:30:11 +0900