NF3 and F2 gas fluorination of GaN surface and Pt/GaN interface analyzed by hard X-ray photoelectron spectroscopy

Article

Creator

Asahiko Matsuda ; Takashi Teramoto ; Takahiro Nagata ; Dominic Gerlach ; Peng Shen ; Shigenori Ueda ; Takako Kimura ; Christian Dussarrat ; Toyohiro Chikyow

Keyword

Fluorination, Surface passivation, hard X-ray photoelectron spectroscopy, Gallium nitride

Date published

2024-03-19

Updated at

2024-03-26 14:50:33 +0900