20.1 A 3.5×3.5mm² 1.47mW/ch 16-Channel MSS-CMOS Heterogeneous Multi-Modal-Gas-Sensor Chip Stack

Article

Creator

Kotaro Naruse ; Naru Kato ; Takuma Matsumori ; Jun Shlomi ; Yoshihiro Midoh ; Tetsuya Hirose ; Gaku Imamura ; Genki Yoshikawa ; Constantine Sideris ; Noriyuki Miura

Keyword

gas sensor, CMOS, MEMS

Date published

2025-02-16

Updated at

2025-12-25 16:21:05 +0900