Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating

ジャーナル論文

著者

Michiko Sasaki (author) (この著者で検索)

https://orcid.org/0000-0002-2336-5788

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Michiko Sasaki ;

Yibin Xu (author) (この著者で検索)

https://orcid.org/0000-0001-8600-8748

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yibin Xu ;

Takao Mori (author) (この著者で検索)

https://orcid.org/0000-0003-2682-1846

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takao Mori ;

Masahiro Goto (author) (この著者で検索)

https://orcid.org/0000-0002-1003-2781

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Masahiro Goto

キーワード

Thermoelectric, titanium nitride, thin film, crystal orientation, combinatorial sputter, sputter, TiN

刊行年月日

2026-04-17

更新時刻

2026-09-03 14:04:22 +0900