Effect of Oxygen Terminal Surface Adsorption Layer on Energy Dissipation in Single-Crystal Diamond MEMS

プレゼンテーション

著者

Keyun Gu (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Keyun Gu ;

Zilong Zhang (author) (この著者で検索)

https://orcid.org/0000-0002-9759-9253

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Zilong Zhang ;

Wen Zhao (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Wen Zhao ;

Guo Chen (author) (この著者で検索)

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

Guo Chen ;

Jian Huang (author) (この著者で検索)

China University of Geosciences

Jian Huang ;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

National Institute for Materials Science Research Center for Electronic and Optical Materials

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

National Institute for Materials Science Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group

NIMS Researchers Directory SAMURAI

Meiyong Liao

キーワード

ダイヤモンド, MEMS

刊行年月日

更新時刻

2025-04-12 08:30:28 +0900