Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography

Journal article

Creator

Akira Uedono (author) (Search by this author)

https://orcid.org/0000-0001-6224-4869 (unauthenticated)

Akira Uedono ;

Claudia Fleischmann (author) (Search by this author)

https://orcid.org/0000-0003-1531-6916 (unauthenticated)

Claudia Fleischmann ;

Jean-Philippe Soulié (author) (Search by this author)

Jean-Philippe Soulié ;

Mustafa Ayyad (author) (Search by this author)

Mustafa Ayyad ;

Jeroen E. Scheerder (author) (Search by this author)

https://orcid.org/0000-0002-9301-0392 (unauthenticated)

Jeroen E. Scheerder ;

Christoph Adelmann (author) (Search by this author)

Christoph Adelmann ;

Jun Uzuhashi (author) (Search by this author)

https://orcid.org/0000-0003-2023-8158

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Tadakatsu Ohkubo (author) (Search by this author)

https://orcid.org/0000-0003-3548-1951

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Koji Michishio (author) (Search by this author)

https://orcid.org/0000-0003-1381-7856 (unauthenticated)

Koji Michishio ;

Nagayasu Oshima (author) (Search by this author)

Nagayasu Oshima ;

Shoji Ishibashi (author) (Search by this author)

https://orcid.org/0000-0002-4896-3530 (unauthenticated)

Shoji Ishibashi

Keyword

atom probe tomography, positron annihilation

Date published

2024-07-10

Updated at

2025-07-10 08:30:19 +0900