Effects of Plasma Reactants on Atomic Layer Deposition of Lithium Phosphate and Lithium Phosphorus Oxynitride Electrolyte Films

Journal article

Creator

Tohru Tsuruoka (author) (Search by this author)

https://orcid.org/0000-0002-4322-4309

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Tohru Tsuruoka ;

Samapika Mallik (author) (Search by this author)

https://orcid.org/0000-0001-9281-9416 (unauthenticated)

Samapika Mallik ;

Takuji Tsujita (author) (Search by this author)

Takuji Tsujita ;

Yuu Inatomi (author) (Search by this author)

Yuu Inatomi ;

Kazuya Terabe (author) (Search by this author)

https://orcid.org/0000-0003-3988-3456

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kazuya Terabe

Keyword

atomic layer deposition, lithium phosphate, lithium phosphorus oxynitride, solid-state electrolyte, plasma reactant

Date published

2024-06-25

Updated at

2025-06-25 08:30:22 +0900