Keyword: X-ray diffuse scattering
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JJAP_Horikawa_main text_R4_rev2.pdf
Analyses of oxygen precipitates in CZ-Si by X-ray diffuse scattering using parallel X-ray beam
Journal article
Creator
Tomoyuki Horikawa (author) (Search by this author)
;
Yoshiyuki Tsusaka (author) (Search by this author)
;
Junji Matsui (author) (Search by this author)
;
Tetsuya Tohei (author) (Search by this author)
;
Yusuke Hayashi (author) (Search by this author)
National Institute for Materials Science
ORCID SAMURAI ;
Akira Sakai (author) (Search by this author)
Keyword
Silicon, X-ray diffuse scattering
Date published
2025-04-01
Updated at
2026-02-14 21:58:00 +0900