Oxygen reduction for p-type TeOx thin-film transistor

Journal article

Creator

Seiichi Kato (author) (Search by this author)

https://orcid.org/0000-0002-6427-5463

MANA, NIMS

NIMS Researchers Directory SAMURAI

Seiichi Kato ;

Masayuki Okamura (author) (Search by this author)

https://orcid.org/0009-0003-3636-6653 (unauthenticated)

MANA, NIMS

Masayuki Okamura ;

Tomomi Sawada (author) (Search by this author)

https://orcid.org/0000-0002-2335-4480 (unauthenticated)

MANA, NIMS

Tomomi Sawada ;

Toshihide Nabatame (author) (Search by this author)

https://orcid.org/0000-0002-5973-0230

MANA, NIMS

NIMS Researchers Directory SAMURAI

Toshihide Nabatame ;

Kazuhito Tsukagoshi (author) (Search by this author)

https://orcid.org/0000-0001-9710-2692

MANA, NIMS

NIMS Researchers Directory SAMURAI

Kazuhito Tsukagoshi

Keyword

oxide transistor, p-type TFT, TeOx, BEOL compatible, reducing agent, tungsten

Date published

2026-05-25

Updated at

2026-06-09 17:58:56 +0900