Surface Modification for High Reliability and Reversible Hybrid Interconnection

Conference poster

Creator

Akitsu Shigetou (author) (Search by this author)

https://orcid.org/0000-0001-7054-3674

Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Akitsu Shigetou

Keyword

Hybrid bonding, Cu, Solid state debonding

Date published

Updated at

2026-01-21 09:20:22 +0900