Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification

Journal article

Creator

Kohei Tuzuku (author) (Search by this author)

Kohei Tuzuku ;

Masataka Imura (author) (Search by this author)

https://orcid.org/0000-0002-4236-9549

NIMS Researchers Directory SAMURAI

Masataka Imura ;

Hironori Okumura (author) (Search by this author)

https://orcid.org/0000-0002-5464-9169 (unauthenticated)

Hironori Okumura

Keyword

GaN, EB lithography

Date published

2025-06-01

Updated at

2025-12-26 10:20:58 +0900