High-quality Factor Diamond MEMS Resonators for Ultra-precise Thermometry

Conference presentation

Creator

Wen Zhao (author) (Search by this author)

https://orcid.org/0000-0001-8159-8195 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

Wen Zhao ;

Guo Chen (author) (Search by this author)

https://orcid.org/0009-0004-9263-5616 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

Guo Chen ;

Zhaozong Zhang (author) (Search by this author)

https://orcid.org/0009-0003-8745-4469 (unauthenticated)

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

Zhaozong Zhang ;

Satoshi KOIZUMI (author) (Search by this author)

https://orcid.org/0000-0003-4961-5658

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Satoshi KOIZUMI ;

Meiyong Liao (author) (Search by this author)

https://orcid.org/0000-0003-1361-4266

Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Meiyong Liao

Keyword

Diamond,, MEMS

Date published

Updated at

2026-01-09 11:00:08 +0900