XPS spectral data for p- and n-type Si wafers with various resistivities acquired at SPring-8 BL15

Dataset

Creator

SUMIYA, Masatomo (author) (Search by this author)

https://orcid.org/0000-0003-0960-3812

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

SUMIYA, Masatomo

Keyword

XPS, SPring-8 BL15, Si

Date published

Updated at

2024-05-24 08:30:24 +0900