Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating

Journal article

Creator

Michiko Sasaki (author) (Search by this author)

https://orcid.org/0000-0002-2336-5788

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Michiko Sasaki ;

Yibin Xu (author) (Search by this author)

https://orcid.org/0000-0001-8600-8748

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yibin Xu ;

Takao Mori (author) (Search by this author)

https://orcid.org/0000-0003-2682-1846

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takao Mori ;

Masahiro Goto (author) (Search by this author)

https://orcid.org/0000-0002-1003-2781

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Masahiro Goto

Keyword

Thermoelectric, titanium nitride, thin film, crystal orientation, combinatorial sputter, sputter, TiN

Date published

2026-04-17

Updated at

2026-09-03 14:04:22 +0900