Independent control of the thermoelectric parameters in titanium nitride thin films via crystal preferred orientation control using the combinatorial sputter coating
- Journal article
- Creator
-
Michiko Sasaki (author) (Search by this author)National Institute for Materials Science
;
Yibin Xu (author) (Search by this author)National Institute for Materials Science
;
Takao Mori (author) (Search by this author)National Institute for Materials Science
;
Masahiro Goto (author) (Search by this author)National Institute for Materials Science
- Keyword
- Thermoelectric, titanium nitride, thin film, crystal orientation, combinatorial sputter, sputter, TiN
- Date published
- 2026-04-17
- Updated at
- 2026-09-03 14:04:22 +0900
XAFS spectrum of Titanium nitride
- Dataset
- Collection
- MDR XAFS DB
- Creator
-
Masashi Ishii (editor) (Search by this author)National Institute for Materials Science
;
Industrial Application and Partnership Division (author) (Search by this author)Japan Synchrotron Radiation Research Institute - Keyword
- collection - MDR XAFS DB, XAFS, SPring-8, BL14B2, Si(111), TiN, Ti K-edge, Nitride, Titanium nitride
- Date published
- 2021-07-21
- Updated at
- 2025-05-02 21:47:28 +0900