An Advanced Epitaxial Strategy Enabling Vertical GaN Devices on Silicon Wafers

Journal article

Creator

Fumio Kawamura (author) (Search by this author)

https://orcid.org/0000-0003-0724-1475

NIMS Researchers Directory SAMURAI

Fumio Kawamura ;

Takeyoshi Onuma (author) (Search by this author)

Takeyoshi Onuma ;

Kazutaka Mitsuishi (author) (Search by this author)

https://orcid.org/0000-0002-9361-4057

NIMS Researchers Directory SAMURAI

Kazutaka Mitsuishi

Keyword

GaN on Si, Epitaxial, Buffer, Sputtering, MOCVD

Date published

2026-05-29

Updated at

2026-09-17 13:05:42 +0900