Compositional changes between metastable SnO and stable SnO2 in a sputtered film for p-type thin-film transistors

ジャーナル論文

著者

Yong-Lie Sun (author) (この著者で検索)

https://orcid.org/0000-0003-1113-1658

Yong-Lie Sun ;

Toshihide Nabatame (author) (この著者で検索)

Toshihide Nabatame ;

Jong Won Chung (author) (この著者で検索)

https://orcid.org/0000-0002-9799-7438 (unauthenticated)

Jong Won Chung ;

Tomomi Sawada (author) (この著者で検索)

Tomomi Sawada ;

Hiromi Miura (author) (この著者で検索)

Hiromi Miura ;

Manami Miyamoto (author) (この著者で検索)

Manami Miyamoto ;

Kazuhito Tsukagoshi (author) (この著者で検索)

https://orcid.org/0000-0001-9710-2692

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kazuhito Tsukagoshi

キーワード

p-type SnO, Thin-film transistors, Sputtering, High vacuum Annealing

刊行年月日

2024-10-09

更新時刻

2024-10-15 16:30:30 +0900