Observation of Atomic-Scale Structural Changes in Al₂O₃/GaN Interfacial Layers Prepared with a Dummy-SiO₂ Process

ジャーナル論文

著者

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Yoshihiro Irokawa (author) (この著者で検索)

https://orcid.org/0000-0002-6531-4356

NIMS Researchers Directory SAMURAI

Yoshihiro Irokawa ;

Toshihide Nabatame (author) (この著者で検索)

https://orcid.org/0000-0002-5973-0230

NIMS Researchers Directory SAMURAI

Toshihide Nabatame ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Yasuo Koide (author) (この著者で検索)

Yasuo Koide

キーワード

transmission electron microscopy, metal-oxide-semiconductor

刊行年月日

2025-08-01

更新時刻

2025-08-26 11:15:20 +0900