Surface Modification for High Reliability and Reversible Hybrid Interconnection

会議発表ポスター

著者

Akitsu Shigetou (author) (この著者で検索)

https://orcid.org/0000-0001-7054-3674

National Institute for Materials Science Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team

NIMS Researchers Directory SAMURAI

Akitsu Shigetou

キーワード

Hybrid bonding, Cu, Solid state debonding

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更新時刻

2026-01-21 09:20:22 +0900