Analysis of In x Ga1− x N growth rate in atmospheric-pressure metal-organic vapor phase epitaxy: Insights into incorporation and desorption processes of GaN and InN for precise growth control

ジャーナル論文

著者

Masataka Imura (author) (この著者で検索)

https://orcid.org/0000-0002-4236-9549

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Masataka Imura ;

Takanobu Hiroto (author) (この著者で検索)

https://orcid.org/0000-0002-6176-5782

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takanobu Hiroto ;

Takaaki Mano (author) (この著者で検索)

https://orcid.org/0000-0002-6955-260X

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takaaki Mano ;

Yuri Itokazu (author) (この著者で検索)

Yuri Itokazu ;

Masafumi Jo (author) (この著者で検索)

Masafumi Jo

キーワード

MOVPE, GaN, InN, InGaN, XRD, Superlattice

刊行年月日

2026-03-21

更新時刻

2026-04-03 09:31:08 +0900