Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects

Journal article

Creator

Takayuki Harada (author) (Search by this author)

https://orcid.org/0000-0002-8657-2258

NIMS Researchers Directory SAMURAI

Takayuki Harada ;

Zuin Ping Lily Ang (author) (Search by this author)

https://orcid.org/0009-0008-1139-7273 (unauthenticated)

Zuin Ping Lily Ang ;

Yuki Sakakibara (author) (Search by this author)

https://orcid.org/0009-0005-8271-2531 (unauthenticated)

Yuki Sakakibara ;

Takuro Nagai (author) (Search by this author)

https://orcid.org/0000-0001-5239-3334

NIMS Researchers Directory SAMURAI

Takuro Nagai ;

Yasushi Masahiro (author) (Search by this author)

https://orcid.org/0000-0003-4526-6817 (unauthenticated)

Yasushi Masahiro

Keyword

Interconnect, Thin films, Conductive material, Low dimensional materials, Electronic materials

Date published

2025-06-02

Updated at

2025-06-10 08:30:11 +0900