Surface Modification for High-Reliability and Multi-Functional Hybrid Interconnections

Conference presentation

Creator

Akitsu Shigetou (author) (Search by this author)

https://orcid.org/0000-0001-7054-3674

Research Center for Materials Nanoarchitectonics (MANA)/Semiconductor Materials Field/Smart Interface Team, National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Akitsu Shigetou

Keyword

Low temperature bonding, Electronics packaging, VUV, Hybrid bonding

Date published

Updated at

2026-01-20 17:12:48 +0900