Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

ジャーナル論文

著者

Emi Kano (author) (この著者で検索)

https://orcid.org/0000-0001-6134-4980 (unauthenticated)

Emi Kano ;

Jun Uzuhashi (author) (この著者で検索)

https://orcid.org/0000-0003-2023-8158

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Jun Uzuhashi ;

Koki Kobayashi (author) (この著者で検索)

Koki Kobayashi ;

Kosuke Ishikawa (author) (この著者で検索)

Kosuke Ishikawa ;

Kyosuke Sawabe (author) (この著者で検索)

Kyosuke Sawabe ;

Tetsuo Narita (author) (この著者で検索)

Tetsuo Narita ;

Kacper Sierakowski (author) (この著者で検索)

Kacper Sierakowski ;

Michal Bockowski (author) (この著者で検索)

Michal Bockowski ;

Tadakatsu Ohkubo (author) (この著者で検索)

https://orcid.org/0000-0003-3548-1951

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Tetsu Kachi (author) (この著者で検索)

Tetsu Kachi ;

Nobuyuki Ikarashi (author) (この著者で検索)

https://orcid.org/0000-0002-5575-5780 (unauthenticated)

Nobuyuki Ikarashi

キーワード

gallium nitride, atom probe tomography, transmission electron microscopy

刊行年月日

2024-04-22

更新時刻

2024-09-20 16:30:27 +0900