Reducing vertex radius of curvature for 100 nm size square and triangular holes in GaN by shape modification

ジャーナル論文

著者

Kohei Tuzuku (author) (この著者で検索)

Kohei Tuzuku ;

Masataka Imura (author) (この著者で検索)

https://orcid.org/0000-0002-4236-9549

NIMS Researchers Directory SAMURAI

Masataka Imura ;

Hironori Okumura (author) (この著者で検索)

https://orcid.org/0000-0002-5464-9169 (unauthenticated)

Hironori Okumura

キーワード

GaN, EB lithography

刊行年月日

2025-06-01

更新時刻

2025-12-26 10:20:58 +0900