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Description:

Operando hydrogen microscope (OHM) is an original hydrogen visualization equipment using electron stimulated desorption (ESD) method. In the equipment, permeated hydrogen atoms through the sample membrane are ionized by incident electron on the sample surface, desorbed into UHV environment and detected. By using the electron source of a scanning electron microscope (SEM) as the excitation source for ESD, we visualize the surface hydrogen distribution from the hydrogen desorption position. In the paper, we used OHM to visualize hydrogen leak position in standard conductance element (SCE), which is a filter of open type standard leak. As an example of measurement, we also identified the location of a leak in a sealing device.

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

Keyword: Hydrogen, Visualization, micro leakage

Date published: 2024-12-10

Publisher: Surface Science Society Japan

Journal:

• Vacuum and Surface Science (ISSN: 24335835) vol. 67 issue. 12 p. 608-614 20181383

Funding:

• JSPS 18H03849

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1380/vss.67.608

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Updated at: 2025-12-10 08:30:51 +0900

Published on MDR: 2025-12-10 08:23:54 +0900