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説明:

Operando hydrogen microscope (OHM) is an original hydrogen visualization equipment using electron stimulated desorption (ESD) method. In the equipment, permeated hydrogen atoms through the sample membrane are ionized by incident electron on the sample surface, desorbed into UHV environment and detected. By using the electron source of a scanning electron microscope (SEM) as the excitation source for ESD, we visualize the surface hydrogen distribution from the hydrogen desorption position. In the paper, we used OHM to visualize hydrogen leak position in standard conductance element (SCE), which is a filter of open type standard leak. As an example of measurement, we also identified the location of a leak in a sealing device.

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

キーワード: Hydrogen, Visualization, micro leakage

刊行年月日: 2024-12-10

出版者: Surface Science Society Japan

掲載誌:

• Vacuum and Surface Science (ISSN: 24335835) vol. 67 issue. 12 p. 608-614 20181383

研究助成金:

• JSPS 18H03849

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1380/vss.67.608

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更新時刻: 2025-12-10 08:30:51 +0900

MDRでの公開時刻: 2025-12-10 08:23:54 +0900