顧 克云 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; ジャン ジロン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 陳 果 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; ザオ ウェン (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; Jian Huang (Shanghai University) ; 小泉 聡 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science) ; 小出 康夫 (Research Center for Electronic and Optical Materials, National Institute for Materials Science) ; 廖 梅勇 (Research Center for Electronic and Optical Materials/Functional Materials Field/Ultra-wide Bandgap Semiconductors Group, National Institute for Materials Science)

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顧 克云, ジャン ジロン, 陳 果, ザオ ウェン, Jian Huang, 小泉 聡, 小出 康夫, 廖 梅勇. Disclosing surface adsorptions of oxygen- and hydrogen-terminated diamond via MEMS. https://doi.org/10.48505/nims.5089

(BibTeX)

Alternative title: 単結晶ダイヤモンドMEMSによる酸素および水素終端表面吸着と脱着の解明

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(abstract)

In this work, we fabricated SCD resonators and clarified the desorption characteristics of O-terminated and H-terminated diamond by in situ heating the cantilevers and measuring the resonance frequencies of cantilevers.

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Keyword: Diamond, MEMS

Conference: 第３８回ダイヤモンドシンポジウム (2024-11-20 - 2024-11-22)

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Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.5089

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Updated at: 2024-12-05 08:30:45 +0900

Published on MDR: 2024-12-05 08:30:45 +0900

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