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Description:

Magnetron sputtering inherently exhibits the advantage of dislodging particles from the target in a ratio
equivalent to the target stoichiometry. Nevertheless, film compositions often deviate due to element-dependent scattering with the working gas, necessitating the adjustment of the sputtering process. In this work, we explore an unconventional approach to addressing this issue, involving the employment of an off-stoichiometric target. The required composition is obtained through an iterative process, which is demonstrated by Fe2VAl and Fe2V0.9Ti0.1Al films as case studies. Ultimately, the correct stoichiometry is obtained from Fe1.86V1.15Al0.99 and Fe1.88V1.02Ti0.13Al0.97 targets, respectively. Despite the thermoelectric properties falling below expectations, mainly due to imperfect film crystallization, the strategy successfully achieved the desired stoichiometry, enabling accurate film synthesis without the need for advanced sputtering setups.

Rights:

• In Copyright
  

  ©2024 American Physical Society

Keyword: thermoelectric

Date published: 2024-09-25

Publisher: American Physical Society (APS)

Journal:

• Physical Review Materials (ISSN: 24759953) vol. 8 issue. 9 095402

Funding:

• Japan Science and Technology Agency JPMJMI19A1

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4818

First published URL: https://doi.org/10.1103/physrevmaterials.8.095402

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Updated at: 2024-10-10 08:30:33 +0900

Published on MDR: 2024-10-10 08:30:33 +0900