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We have made additional evaluations of the electron inelastic mean free paths ([MFPs) and of the predictive IMFP formula TPP-2 presented in papers II and III of this series. Comparisons have been made with other formulae for the IMFPs and electron attenuation lengths (ALs). We find substantial differences between our IMFP results for 27 elements and 15 inorganic compounds and the AL formulae of Seah and Dench; these differences include different dependences on electron energy and on material parameters. We present IMFP calculations for Al2O3 and GaAs from TPP-2 in which each parameter of the formula is varied in some physically reasonable range about the true value for each compound; these results show the sensitivity of the computed IMFPs to the choices of parameter values. Finally, we give a summary of sources of uncertainty in the IMFP algorithm, in the experimental optical data from which IMFPs are calculated, and of the TPP-2 formula. We conclude that TPP-2 is robust and useful for predicting IMFPs for electron energies and material parameter values in ranges for which the formula was developed and tested.

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• In Copyright
  

  This is the peer reviewed version of the following article: Calculations of Electron Inelastic Mean Free Paths IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP-2 for electron energies between 50 and 2000 eV, which has been published in final form at https://doi.org/10.1002/sia.740200112. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.

Keyword: IMFP, predictive IMFP formula TPP-2, Evaluations of TPP-2 formula

Date published: 2004-09-15

Publisher: Wiley

Journal:

• Surface and Interface Analysis (ISSN: 01422421) vol. 20 issue. 1 p. 77-89

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4255

First published URL: https://doi.org/10.1002/sia.740200112

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Contact agent: Tanuma, Shigeo (装置開発・共用部門, NIMS) tanuma-sh@tbd.t-com.ne.jp

Updated at: 2023-11-07 15:36:26 +0900

Published on MDR: 2023-11-07 13:30:14 +0900