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A direct focused He+ beam direct machining is presented to fabricate solid-state nano-disk at the surface of a graphene multilayer micro-flake deposited on an Au/Ti/sapphire surface. At irradiation doses larger than 5.0×1017 ions/cm2 and with a beam size well below 1 nm, graphene disks down to 20 nm in diameter have been machined with for nano-disk down to 50 nm in diameter, a central hole for preparing the positioning of a rotation axle. The local heat generated by this irradiation is inducing a partial graphene amorphization and deformation, leading to a complete graphene nano-disk vaporization at doses larger than 5×1018 ions/cm2. A dry transfer printing technique followed by a graphene surface cleaning was used to transfer the nano-disks from its initial surface to a fresh and clean surface. Tapping mode atomic force micrograph has been recorded to follow the vaporization as a function of the He+ dose to confirm the graphene solid-state nano-disk fabrication limit to about 20 nm with this process.

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  © 2024 IOP Publishing Ltd
  
  This is an author-created, un-copyedited version of an article accepted for publication/published
  in [insert name of journal]. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or
  any version derived from it. The Version of Record is available online at https://dx.doi.org/10.1088/1361-6528/ad40b5

Keyword: Focused He Ion beam

Date published: 2024-07-29

Publisher: IOP Publishing

Journal:

• Nanotechnology (ISSN: 13616528) vol. 35 issue. 31 315301

Funding:

• Advanced Research Infrastructure for Materials and Nanotechnology (ARIM), MEXT Grant Number: JPMXP1222BA0047
• European FET-Open project MEMO Grant N°766864

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4720

First published URL: https://doi.org/10.1088/1361-6528/ad40b5

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Updated at: 2025-05-16 08:30:30 +0900

Published on MDR: 2025-05-16 08:20:28 +0900