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Due to the presence of an intrinsic C 1s peak in diamond, it is impossible to calibrate its binding energies using the adventitious C 1s peak (284.8 eV) during X-ray photoelectron spectroscopy measurement. The absence of accurate binding energy measurement makes it challenging to determine the interfacial band bending for the oxide/diamond heterojunction. To overcome this issue, a net-patterned gold (Au) mask is applied to the boron-doped diamond (B-diamond) to suppress the charge-up effect and calibrate the binding energy using the standard Au 4f peak (83.96 eV). The B-diamond epitaxial layer shows downward band bending towards the surface with valence band maximum of 0.85 eV. Upon the formation of Al2O3 using an ozone precursor through the atomic layer deposition technique, the B-diamond continues to exhibit downward band bending towards the Al2O3/B-diamond interface. However, the bending energy has reduced, potentially attributed to the modification of the oxygen vacancies on the B-diamond surface by the ozone precursor during the Al2O3 deposition.

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  This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in J. W. Liu, T. Teraji, B. Da, Y. Koide; Calibration of binding energy and clarification of interfacial band bending for the Al2O3/diamond heterojunction. Appl. Phys. Lett. 2 September 2024; 125 (10): 101601 and may be found at https://doi.org/10.1063/5.0230817

Keyword: binding energy calibration, carbon-related materials, XPS, diamond, Band bending

Date published: 2024-09-02

Publisher: AIP Publishing

Journal:

• APPLIED PHYSICS LETTERS (ISSN: 00036951) vol. 125 issue. 10 101601

Funding:

• Japan Society for the Promotion of Science London JP23K03966
• Japan Society for the Promotion of Science London 20H05661
• Japan Society for the Promotion of Science London and JP20H00313
• Ministry of Education, Culture, Sports, Science and Technology JPMXS0118068379
• Core Research for Evolutional Science and Technology JPMJCR1773
• Japan Science and Technology Agency JPMJMS2062

Manuscript type: Author's original (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4748

First published URL: https://doi.org/10.1063/5.0230817

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Updated at: 2024-09-13 12:30:32 +0900

Published on MDR: 2024-09-13 12:30:32 +0900