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The growth of high-quality graphene on flat and rigid templates, such as metal thin films on insulating wafers, is regarded as a key enabler for technologies based on 2D materials. In this work, we introduce the growth of decoupled graphene via non-reducing low-pressure chemical vapor deposition (LPCVD) on crystalline Cu(111) films deposited on sapphire. The resulting film is atomically flat, with no detectable cracks or ripples, and lies atop of a thin Cu2O layer, as confirmed by diffraction and spectroscopic analyses. Post-growth treatment of the partially decoupled graphene enables full and uniform oxidation of the interface, greatly simplifying subsequent transfer processes, particularly dry-pick up — a task that proves challenging when dealing with graphene directly synthesized on metallic Cu(111). Electrical transport measurements reveal high carrier mobility at room temperature, exceeding 104 cm2 V−1 s−1 on SiO2/Si and 105 cm2 V−1 s−1 upon encapsulation in hexagonal boron nitride (hBN). The demonstrated growth approach yields exceptional material quality, in line with micro-mechanically exfoliated graphene flakes, and thus paves the way towards large-scale production of pristine graphene suitable for high-end applications.

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

Keyword: graphene
, chemical vapor deposition (CVD)
, high-mobility


Date published: 2024-09-09

Publisher: Wiley

Journal:

• Advanced Materials (ISSN: 09359648) vol. 36 issue. 44 2404590

Funding:

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1002/adma.202404590

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Updated at: 2026-02-14 21:50:13 +0900

Published on MDR: 2026-02-10 18:03:07 +0900