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Reliable and consistent measurement of various gas molecules at low parts per million (low-ppm) concentration is an essential intermediary step towards low-cost versatile gas analysers. Here we demonstrate physical measurements of various low-ppm molecules by means of an acoustic standing wave-based resonating device with a speaker and a microelectromechanical systems (MEMS) microphone, using either the sound pressure level (SPL) at a fixed frequency, or alternatively, tracking the resonance frequency as gas molecules enter the acoustic device. Low-ppm gas molecules are measurable at frequencies near standing wave resonances, as slight shifts in the speed of sound result in a shift of the acoustic frequency response function. Since a chemical receptor layer on the sensing component is not required for the measurements, absolute physical quantities of the molecules are measurable, which coincide well theoretically with expected values for pure chemicals. Various conditions are tested using different low-ppm molecules to demonstrate the limit of detection (LOD), using a low-cost and portable acoustic setup. An LOD is determined to be in the order of several ppm for most molecules. Gas analysers based on a physical approach present new opportunities for mobile gas sensing in practical applications.

権利情報:

• Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
  © 2024. This manuscript version is made available under the CC-BY-NC-ND 4.0 license https://creativecommons.org/licenses/by-nc-nd/4.0/

キーワード: Acoustics, Audible-range sound waves, Measurement, Gas sensors

刊行年月日: 2024-02-26

出版者: Elsevier BV

掲載誌:

• Sensors and Actuators A: Physical (ISSN: 09244247) vol. 370 115215

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4979

公開URL: https://doi.org/10.1016/j.sna.2024.115215

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更新時刻: 2026-02-27 12:30:28 +0900

MDRでの公開時刻: 2026-02-27 09:51:44 +0900