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The applicability of metal-polymer thin films in flexible electronics and space applications is fundamentally limited by the trade-off between mechanical and functional performance. This study shows how atomic layer deposited (ALD) amorphous AlOxHy interlayers (0–25 nm) directly control the electro-mechanical functionality of sputter-deposited aluminum films on polyimide substrates. Using uni- and equi-biaxial tensile testing with in situ XRD and electrical resistance measurements, it is demonstrated that interlayer thickness determines both deformation mechanisms and electrical strain limits. Adding an ALD layer between the polymer substrate and the metal thin film significantly improves the deformability of the system. While a single ALD cycle enhances ductility, surprisingly a 1 nm AlOxHy interlayer causes early electrical failure. Optimal performance—improved ductility, delayed cracking, and maintained electrical conductivity under large deformation—is achieved at 5–10 nm interlayer thickness. Beyond this range, embrittlement causes early electrical failure through oxide-initiated cracking. The work establishes quantitative design rules linking the nanoscale interface structure to macroscale electro-mechanical performance, enabling flexible electronics with tailored mechanical properties and enhanced electrical functionality. These findings provide a direct pathway from fundamental interface engineering to high-performance flexible devices operating under multi-axial deformation.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: atomic layer deposition, electromechanical properties, flexible polymer substrates, tensile testing, thin films

Date published: 2025-11-27

Publisher: Wiley

Journal:

• Advanced Functional Materials (ISSN: 1616301X) e26343

Funding:

• Helmholtz-Zentrum Berlin für Materialien und Energie 231‐11757‐ST
• Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung PZ00P2_20208
• Amt der Steiermärkischen Landesregierung SPM‐PN 3022
• H2020 Marie Skłodowska-Curie Actions 840222
• Japan Society for the Promotion of Science 24K23036

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1002/adfm.202526343

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Updated at: 2026-01-20 11:54:44 +0900

Published on MDR: 2026-01-20 16:21:58 +0900