論文 Oxygen Defects and Instability in Very Thin a‐IGZO TFTs

Hanjun Cho ORCID ; Masatake Tsuji ORCID ; Shigenori Ueda SAMURAI ORCID ; Junghwan Kim ORCID ; Hideo Hosono SAMURAI ORCID

コレクション

引用
Hanjun Cho, Masatake Tsuji, Shigenori Ueda, Junghwan Kim, Hideo Hosono. Oxygen Defects and Instability in Very Thin a‐IGZO TFTs. Advanced Electronic Materials. 2025, 11 (15), e00349. https://doi.org/10.1002/aelm.202500349

説明:

(abstract)

Amorphous oxide semiconductor (AOS) thin-film transistors (TFT) have gained significant attention for their potential in capacitor-free next-generation memory applications. However, improving threshold voltage (VTH ) stability and precisely controlling carrier concentration in ultra-thin channels remain critical challenges. In this study, an extraordinarily large positive-bias-stress (PBS) instability in hydrogen-free amorphous IGZO (a-IGZO)-TFTs that emerges as the channel thickness decreases is reported. This instability can be attributed to acceptors interacting with donors at shallow levels below the conduction band minimum (CBM).

権利情報:

キーワード: a-IGZO, TFT, Oxygen defects, positive-bias-stress instability

刊行年月日: 2025-07-07

出版者: Wiley

掲載誌:

  • Advanced Electronic Materials (ISSN: 2199160X) vol. 11 issue. 15 e00349

研究助成金:

  • Ministry of Education, Culture, Sports, Science and Technology JPMXP1122683430
  • Japan Society for the Promotion of Science JP23K19266
  • Japan Society for the Promotion of Science JP24K17753

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1002/aelm.202500349

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更新時刻: 2025-09-24 12:30:21 +0900

MDRでの公開時刻: 2025-09-24 12:18:54 +0900

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