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(abstract)

Optical constants of Mg(x)Zn(1-x)O films are measured by spectroscopic ellipsometry (M-2000U, J.A. Woollam Co.), where the Mg(x)Zn(1-x)O films are grown on Zn-polar ZnO (0001) substrates by molecular beam epitaxy. Ellipsometric parameters are measured at every 5 degrees of incidence from 50 to 70 degrees in the wavelength range of 193–1667 nm. The analysis employs a model combining the Tauc-Lorentz model and the Johs-Herzinger model, built in the Woollam WVASE32 software.

Data origin type: experiment

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: Optical constants, Spectroscopic ellipsometry, Zinc oxide

Date published: 2025-02-07

Publisher: NIMS

Journal:

Funding:

Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.5313

First published URL: https://doi.org/10.1016/j.mtquan.2025.100036

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Contact agent: Yusuke Kozuka (Research Center for Materials Nanoarchitectonics, National Institute for Materials Science) KOZUKA.Yusuke@nims.go.jp

Updated at: 2025-08-06 13:02:55 +0900

Published on MDR: 2025-03-05 08:30:10 +0900