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Description:

We have improved synchrotron X-ray diffraction imaging, a type of X-ray diffraction topography (XRDT), and have proposed a new method to visualize the local bending of lattice planes (XR-V-LBLP). Data can be used to perform calculations for the proposed method. Data contain two or more reflections at different azimuthal angles of the sample, and each azimuthal data contains two-dimensional diffraction images of the substrate obtained by rotating the angle of incidence. Please see the attached file for more details.

Data origin type: other

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

Keyword: X-ray diffraction topography

Date published: 2023-03-27

Publisher: National Institute for Materials Science

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Funding:

Manuscript type: Not a journal article

MDR DOI: https://doi.org/10.48505/nims.3864

First published URL: https://pubs.rsc.org/en/content/articlelanding/2018/CE/C8CE01440J

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• Characterization of a 4-inch GaN wafer by X-ray diffraction topography (dataset)
• https://pubs.rsc.org/en/content/articlelanding/2018/CE/C8CE01440J

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Updated at: 2023-03-27 16:02:33 +0900

Published on MDR: 2023-03-27 11:22:42 +0900