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説明:

We have improved synchrotron X-ray diffraction imaging, a type of X-ray diffraction topography (XRDT), and have proposed a new method to visualize the local bending of lattice planes (XR-V-LBLP). Data can be used to perform calculations for the proposed method. Data contain two or more reflections at different azimuthal angles of the sample, and each azimuthal data contains two-dimensional diffraction images of the substrate obtained by rotating the angle of incidence. Please see the attached file for more details.

データの性質: other

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

キーワード: X-ray diffraction topography

刊行年月日: 2023-03-27

出版者: National Institute for Materials Science

掲載誌:

研究助成金:

原稿種別: 論文以外のデータ

MDR DOI: https://doi.org/10.48505/nims.3864

公開URL: https://pubs.rsc.org/en/content/articlelanding/2018/CE/C8CE01440J

関連資料:

• is_supplement_to
• Lattice-plane orientation mapping of homo-epitaxial GaN(0001) thin films via grazing-incidence X-ray diffraction topography in 2-in. wafer (dataset)
• https://iopscience.iop.org/article/10.7567/APEX.11.081002
• is_supplement_to
• Anisotropic mosaicity and lattice-plane twisting of an m-plane GaN homoepitaxial layer (dataset)
• https://pubs.rsc.org/en/content/articlelanding/2019/CE/C9CE00463G
• is_supplement_to
• Characterization of a 4-inch GaN wafer by X-ray diffraction topography (dataset)
• https://pubs.rsc.org/en/content/articlelanding/2018/CE/C8CE01440J

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更新時刻: 2023-03-27 16:02:33 +0900

MDRでの公開時刻: 2023-03-27 11:22:42 +0900