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Microelectromechanical system (MEMS) technology has unlocked a wide range of applications in electronics, mobility-type devices, and medical and energy generation devices from sensors and actuators to switches. Diamond, in particular, stands out for its exceptional mechanical robustness and electronic performance in extreme conditions, offering sensitivity and reliability superior to other semiconductor materials for MEMS sensors. In this perspective, we review the principles of MEMS magnetic sensors, diamond for MEMS, thermal stability of diamond MEMS resonators, and diamond MEMS magnetic sensors, particularly for the applications under high temperatures. We present the interface engineering of diamond MEMS magnetic sensors to improve the thermal stability. Finally, we discuss the potential solutions, outline future research directions, and discuss the prospects for continued progress of diamond MEMS.

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  This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Zilong Zhang, Keyun Gu, Masaya Toda, Meiyong Liao; A perspective on diamond MEMS magnetic sensors. Appl. Phys. Lett. 10 March 2025; 126 (10): 100501 and may be found at https://doi.org/10.1063/5.0255014.

Keyword: Diamond, MEMS, magnetic sensors

Date published: 2025-03-01

Publisher: AIP Publishing

Journal:

• Applied Physics Letters (ISSN: 00036951) vol. 126 issue. 10

Funding:

• Japan Society for the Promotion of Science 24H00287
• Japan Society for the Promotion of Science 22K18957
• Japan Society for the Promotion of Science and 24K00828

Manuscript type: Author's version (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5484

First published URL: https://doi.org/10.1063/5.0255014

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Updated at: 2025-05-19 16:30:19 +0900

Published on MDR: 2025-05-19 16:22:33 +0900