T. Tsuji
;
C. Shinei
;
T. Iwasaki
;
M. Hatano
;
T. Teraji
Description:
(abstract)Reduction of inhomogeneous stress in diamond is crucially important for extracting excellent performance of semiconducting diamond. In this study, to investigate elastic deformation in nitrogen doped (111) diamond films caused by stress, we evaluated the stress in these films using confocal Raman microscopy. The stress was detectable when the misorientation angle (θ_mis) was below 3.7° and it decreased as θ_mis increased. The Raman spectroscopic measurements, considered together with reported stress measurements by nitrogen-vacancy centers, suggest that the diamond film at low θ_mis was subjected to compressive stresses that were stronger in the [111] direction than [11 ̅0] or [1 ̅1 ̅2] directions.
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Keyword: nitrogen vacancy center , diamond, stress
Date published: 2024-11-01
Publisher: IOP Publishing
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Funding:
Manuscript type: Publisher's version (Version of record)
MDR DOI:
First published URL: https://doi.org/10.35848/1882-0786/ad88d4
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Updated at: 2025-07-11 08:30:53 +0900
Published on MDR: 2025-07-11 08:16:47 +0900
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Evaluation of stress in (111) homoepitaxial CVD diamond films by Raman spectrum and nitrogen-vacancy centers.pdf
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