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Alternative title: Surface Sensitivity and Detection Depth for Electron Spectroscopy

Description:

The four physical parameters describing inelastic scattering of electrons, which is a measure of surface sensitivity, were described. The definitions of the four parameters, namely, inelastic mean free path (IMFP), mean escape depth (MED), effective attenuation length (EAL), and information depth (ID), are given, and their determination methods and predictive equations were explained. Most of these equations are also applicable to hard X-ray photoelectron spectroscopy. At this time, the author concludes that IMFP and MED are the most appropriate parameters to describe surface sensitivity and detection depth from the standpoint of clarity of definition and practicality.

Rights:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

  Creative Commons BY-NC Attribution-NonCommercial 4.0 International

Keyword: surface sensitivity, mean escape depth, effective attenuation length, information depth, inelastic mean free path

Date published: 2022-03-10

Publisher:

Journal:

• Vacuum and Surface Science (ISSN: 24335835) vol. 65 issue. 3 p. 102-108

Funding:

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.3853

First published URL: https://doi.org/10.1380/vss.65.102

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Updated at: 2024-01-05 22:12:47 +0900

Published on MDR: 2023-02-01 12:31:07 +0900