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代替タイトル: Surface Sensitivity and Detection Depth for Electron Spectroscopy

説明:

The four physical parameters describing inelastic scattering of electrons, which is a measure of surface sensitivity, were described. The definitions of the four parameters, namely, inelastic mean free path (IMFP), mean escape depth (MED), effective attenuation length (EAL), and information depth (ID), are given, and their determination methods and predictive equations were explained. Most of these equations are also applicable to hard X-ray photoelectron spectroscopy. At this time, the author concludes that IMFP and MED are the most appropriate parameters to describe surface sensitivity and detection depth from the standpoint of clarity of definition and practicality.

権利情報:

• Creative Commons BY-NC Attribution-NonCommercial 4.0 International
  

  Creative Commons BY-NC Attribution-NonCommercial 4.0 International

キーワード: surface sensitivity, mean escape depth, effective attenuation length, information depth, inelastic mean free path

刊行年月日: 2022-03-10

出版者:

掲載誌:

• Vacuum and Surface Science (ISSN: 24335835) vol. 65 issue. 3 p. 102-108

研究助成金:

原稿種別: 著者最終稿 (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.3853

公開URL: https://doi.org/10.1380/vss.65.102

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更新時刻: 2024-01-05 22:12:47 +0900

MDRでの公開時刻: 2023-02-01 12:31:07 +0900