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Description:

A novel patterning method achieves a two-dimensional nano-pattern of metal nanofibers by depositing a platinum-cerium alloy film on a silicon wafer and inducing phase separation in an oxygen-carbon monoxide atmosphere. The resulting nano-patterned thin film, Pt#CeO2/Si, consisting of platinum and cerium oxide with an average pattern width of 50 nm, exhibits potential as a hydrogen sensor with sensitive electrical responses to hydrogen ad/desorption. This introduced patterning method addresses the challenge of wavelength limitations in traditional optical lithography, offering a scalable approach for sub-50 nm patterns crucial in advanced sensor and electronic applications.

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• In Copyright
  

Keyword: Alloy, Hydrogen gas sensing, Nano-phase separation

Date published: 2024-04-17

Publisher: Royal Society of Chemistry (RSC)

Journal:

• Nanoscale Advances (ISSN: 25160230) vol. 6 issue. 10 p. 2582-2585

Funding:

• Japan Society for the Promotion of Science 22H01799
• Ministry of Education, Culture, Sports, Science and Technology JPMXP1223NM5363

Manuscript type: Author's original (Submitted manuscript)

MDR DOI: https://doi.org/10.48505/nims.5057

First published URL: https://doi.org/10.1039/d4na00071d

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Updated at: 2024-12-05 12:47:34 +0900

Published on MDR: 2024-12-05 12:47:35 +0900