Article Multiple-angle incidence resolution spectrometry: applications in nanoarchitectonics and applied physics

Nobutaka Shioya ORCID ; Taizo Mori ORCID ; Katsuhiko Ariga SAMURAI ORCID (National Institute for Materials ScienceROR) ; Takeshi Hasegawa ORCID

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Citation
Nobutaka Shioya, Taizo Mori, Katsuhiko Ariga, Takeshi Hasegawa. Multiple-angle incidence resolution spectrometry: applications in nanoarchitectonics and applied physics. Japanese Journal of Applied Physics. 2024, 63 (6), 60102-. https://doi.org/10.35848/1347-4065/ad4ad8
SAMURAI

Description:

(abstract)

The cutting-edge thin film studies using the multiple-angle incidence resolution spectrometry (MAIRS) are introduced from the principle to forefront applications in a wide variety of research fields covering semiconductor material with respect to nanoarchitectonics. In this review, in addition, another application for physics purposes is also introduced where phonon in thin films is discriminated from normal infrared absorption bands by using the MAIRS technique.

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  • In Copyright
    © 2024 The Japan Society of Applied Physics
    This is an author-created, un-copyedited version of an article accepted for publication/published in Japanese Journal of Applied Physics. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at https://doi.org/10.35848/1347-4065/ad4ad8.

Keyword: MAIRS, nanoarchitectonics, IR, spectrometry

Date published: 2024-06-03

Publisher: IOP Publishing

Journal:

  • Japanese Journal of Applied Physics (ISSN: 00214922) vol. 63 issue. 6 p. 60102-

Funding:

  • Asahi Glass Foundation
  • Japan Society for the Promotion of Science Grant-in-Aid Challenges in Research (Exploratory)

Manuscript type: Author's version (Accepted manuscript)

MDR DOI: https://doi.org/10.48505/nims.4545

First published URL: https://doi.org/10.35848/1347-4065/ad4ad8

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Updated at: 2025-05-13 08:30:12 +0900

Published on MDR: 2025-05-13 08:19:27 +0900

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