Article Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization

Sayantan Ghosh ; Muhammad Bilal Khan ; Phanish Chava ; Kenji Watanabe SAMURAI ORCID (National Institute for Materials Science) ; Takashi Taniguchi SAMURAI ORCID (National Institute for Materials Science) ; Slawomir Prucnal ; René Hübner ; Thomas Mikolajick ; Artur Erbe ; Yordan M. Georgiev

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Citation
Sayantan Ghosh, Muhammad Bilal Khan, Phanish Chava, Kenji Watanabe, Takashi Taniguchi, Slawomir Prucnal, René Hübner, Thomas Mikolajick, Artur Erbe, Yordan M. Georgiev. Novel Mixed-Dimensional hBN-Passivated Silicon Nanowire Reconfigurable Field Effect Transistors: Fabrication and Characterization. ACS Applied Materials & Interfaces. 2023, 15 (34), 40709-40718.
SAMURAI

Description:

(abstract)

This work demonstrates the novel concept of a mixed-dimensional reconfigurable field effect transistor (RFET) by combining a one-dimensional (1D) channel material like a silicon (Si) nanowire with a two-dimensional (2D) material as a gate dielectric. An RFET is an innovative device that can be dynamically programmed to perform as either n- or p-FET by applying appropriate gate potentials. In this work, an insulating 2D material, hexagonal boron nitride (hBN) is introduced as a gate dielectric and encapsulation layer around the nanowire in place of a thermally grown or atomic- layer-deposited (ALD) oxide. hBN flake was mechanically exfoliated and transferred onto a silicon nanowire-based RFET device using the dry viscoelastic stamping transfer technique. The thickness of the hBN flakes was investigated by atomic force microscopy and transmission electron microscopy. The ambipolar transfer characteristics of the Si- hBN RFETs with different gating architectures showed a significant improvement in subthreshold swing, p-n on-currents, hysteresis, and on-off ratio (ION/IOFF) due to the encapsulation and passivation of the nanowire with the hBN flake.

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Keyword: Reconfigurable field effect transistor, silicon nanowire, hexagonal boron nitride

Date published: 2023-08-30

Publisher: American Chemical Society (ACS)

Journal:

  • ACS Applied Materials & Interfaces (ISSN: 19448252) vol. 15 issue. 34 p. 40709-40718

Funding:

  • H2020 Future and Emerging Technologies 899282

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1021/acsami.3c04808

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Updated at: 2025-03-01 08:30:31 +0900

Published on MDR: 2025-03-01 08:30:31 +0900

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